Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-031]
- 17:30-19:00 ~
- Title:Measurement of Ion Energy Distribution According to Positive Voltage Applied to the Substrate
- Dae Chul Kim, Jong-Bae Park, and Young-Woo Kim (NFRI, Korea)
Abstract Download
