Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-028]
- 17:30-19:00 ~
- Title:Model Predictive Control of Electron Density for Ar/SF6 Etching Plasma
- Sangwon Ryu, Hyun-Joon Roh, Yunchang Jang, Damdae Park, Junmo Koo, Jongmin Lee, and Gon-Ho Kim (Seoul Nat`l Univ., Korea)
Abstract Download
