Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-027]
- 17:30-19:00 ~
- Title:Experimental Study on Arcing Detection Technology in PECVD Process
- Hye-Ju Hwang, Sang-Ho Park, Chul Lee, Kwang-Jung Son, KeunHyeok Lee, HyunCheol Wang, and Nae Il Lee (Wonik IPS, Korea)
Abstract Download
