Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-023]
- 17:30-19:00 ~
- Title:The Comparison of End-Point Detection between Optical Spectroscopy and Residual Gas Analysis in Silicon Etching in NF3/Ar Plasma
- Heetae Kwon, Hwanhee Lee, Giwon Shin, Woojae Kim, and Gichung Kwon (Kwangwoon Univ., Korea)
Abstract Download
