Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-021]
- 17:30-19:00 ~
- Title:Introduction of Thickness Monitoring Sensor, SR as Integrated Metrology in PECVD System
- Chul Lee, Hyeju Hwang, Sangho Park, Kwangjung Son, Keunhyeok Lee, Hyuncheol Wang, and Nae Il Lee (Wonik IPS, Korea)
Abstract Download
