Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-020]
- 17:30-19:00 ~
- Title:Experimental and Numerical Analysis of Nanoscale Particle Created during PECVD of Amorphous Carbon Layer
- Dongbin Kim1, Seungki Chae1, Sang-Woo Kang2, and Taesung Kim1 (1Sungkyunkwan Univ, Korea, 2Univ. of Science and Tech., Korea)
Abstract Download
