Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-019]
- 17:30-19:00 ~
- Title:Research and Patent Trend Analysis of Plasma Technology for Next-Generation Semiconductor Manufacturing Process and Manufacturing Equipment Development
- Ki-hwan Cho (NFRI, Korea)
Abstract Download
