Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-015]
- 17:30-19:00 ~
- Title:Fluid Simulation on Plasma Characteristics of RF Capacitively Coupled Plasma Sustained in SiH4/N2/O2 and Ar/SiH4/N2O
- Wen-Zhu Jia, Yuan-Hong Song, and You-Nian Wang (Dalian Univ. of Tech., China)
Abstract Download
