Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-014]
- 17:30-19:00 ~
- Title:Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables
- Hyun-Joon Roh1, Sangwon Ryu1, Yunchang Jang1, Nam-Kyun Kim1, Younggil Jin2, Seolhye Park2, and Gon-Ho Kim1 (1Seoul Nat`l Univ., Korea, 2Samsung Display Co., Ltd., Korea)
Abstract Download
