Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-011]
- 17:30-19:00 ~
- Title:Plasma Copolymerization of Ultra-Low Dielectric Constant SiCOH Films Using Octamethylcyclotetrasiloxane and Tetraethyl Orthosilicate Precursors
- Yoonsoo Park, Sungyool Kwon, Wonjin Ban, Hyuna Lim, and Donggeun Jung (Sungkyunkwan Univ., Korea)
Abstract Download
