Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-010]
- 17:30-19:00 ~
- Title:Low Dielectric Constant Plasma Polymerized SiCOH Film Deposited from Tetrakis(trimethylsilyoxy) Silane as a Flexible Insulator
- Hyuna Lim1, Wonjin Ban1, Sungyool Kwon1, Yoonsoo Park1, Younghyun Kim1, Seonhee Jang2, and Donggeun Jung1 (1Sungkyunkwan Univ., Korea, 2Univ. of Louisiana at Lafayette, USA)
Abstract Download
