Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-009]
- 17:30-19:00 ~
- Title:Al2O3-CxHy Multilayer Thin Films Manufactured by Plasma-Enhanced Atomic Layer Deposition and Plasma Polymerization for Moisture Barrier Film
- Jin Young Lee1, Woo Seok Kang2, Dae Woong Kim2, Jae Ok Lee2, Min Hur2, and Gon Ho Kim1 (1Seoul Nat`l Univ., Korea, 2KIMM, Korea)
Abstract Download
