Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-007]
- 17:30-19:00 ~
- Title:On the Carrier Concentration of Nanocrystalline Si:H Films Made by Inductively Coupled Plasma with Low-Inductance Antenna
- H.H. Yang and Jyh-Shiarn Cherng (Ming Chi Univ. of Tech., Taiwan)
Abstract Download