Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-006]
- 17:30-19:00 ~
- Title:High-Quality Cobalt Thin Film Deposited by Using Very High Frequency Plasma-Enhanced Atomic Layer Deposition
- Won-kyun Yeom and Geun-Young Yeom (Sungkyunkwan Univ., Korea)
Abstract Download
