Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-005]
- 17:30-19:00 ~
- Title:The Role of Discharge in Plasma Assisted Atomic Layer Deposition Technique
- Zhongwei Liu, Zhengduo Wang, Lijun Sang, and Qiang Chen (Beijing Inst. of Graphic Communication, China)
Abstract Download
