Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-003]
- 17:30-19:00 ~
- Title:A Study on the Passivation Characteristics According to the RF-Power Variable of Tunnel Oxide Layer Using N2O Gas
- Sehyeon Kim, Sanguk Han, Sooyoung Park, Geonju Yoon, Youngseok Lee, Sangho Kim, Seongho Jeon, Donggi Shin, and Junsin Yi (Sungkyunkwan Univ., Korea)
Abstract Download
