Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-002]
- 17:30-19:00 ~
- Title:Tungsten Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition with Tungsten Chloride Precursor
- Seunggi Seo1, Yujin Lee1, Il-Kwon Oh1, Bonggeun Shong2, and Hyungjun Kim1 (1Yonsei Univ., Korea, 2Hongik Univ., Korea)
Abstract Download
