Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-001]
- 17:30-19:00 ~
- Title:TixSi1-xO2 Deposited by Plasma-Enhanced Atomic Layer Deposition for Spacer Application
- Sanghun Lee1, Woo-Jae Lee2, Wontae Noh3, Satoko Gatineau3, Se-Hun Kwon2, and Hyungjun Kim1 (1Yonsei Univ., Korea, 2Pusan Nat`l Univ., Korea, 3Air Liquide Lab., Korea)
Abstract Download
