Date
Place
- Room D (#115)
- FD3. Plasma Assisted Process Monitoring Technologies
- July 27 (Fri.)
- 14:30-17:00 ~
- [FD3-5]
- 16:00-16:20 ~
- Title:Performance Evaluation Method of RF Generators with In-Situ Plasma Process Monitoring Sensors
- Kyung Jae Jo, Syed Ashar Ali, and Sang Jeen Hong (Myongji Univ., Korea)
Abstract Download
