Date
Place
- Room D (#115)
- FD3. Plasma Assisted Process Monitoring Technologies
- July 27 (Fri.)
- 14:30-17:00 ~
- [FD3-3]
- 15:20-15:40 ~
- Title:Development of Plasma Information Based Virtual Metrology to Trace the Drift of Plasma-Assisted Processes
- Hyun-Joon Roh1, Sangwon Ryu1, Yunchang Jang1, Nam-Kyun Kim1, Younggil Jin2, Seolhye Park2, and Gon-Ho Kim1 (1Seoul Nat`l Univ., Korea, 2Samsung Display Co., Ltd., Korea)
Abstract Download
