Date
Place
- Room C (#114)
- FC1. Plasma & Atomic Layer Etching
- July 27 (Fri.)
- 09:10-10:40 ~
- [FC1-3]
- 10:10-10:40 ~
- Title:[Invited] Frontiers of Industrial Application of Atomic Layer Etching
- Alok Ranjan1 and Peter Ventzek2 (1TEL Tech. Center, America, USA, 2Tokyo Electron America, Inc., USA)
Abstract Download
