Date
Place
- Room A (#104~106)
- FA1. Sputtering / Ion Beam Applications
- July 27 (Fri.)
- 09:00-10:20 ~
- [FA1-4]
- 10:00-10:20 ~
- Title:Damage Control for Transistor Junction Engineering by Using Aromatic Hydrocarbon Ion Implantation
- Kyungwon Lee1, DaeHo Yoon1, Dwight Roh2, Michael Ameen2, Ronald Reece2, and Rimpyo Hong2 (1Sungkyunkwan Univ., Korea, 2Axcelis Technologies, Inc., USA)
Abstract Download
