Date
Place
- Room A (#104~106)
- FA1. Sputtering / Ion Beam Applications
- July 27 (Fri.)
- 09:00-10:20 ~
- [FA1-3]
- 09:40-10:00 ~
- Title:Magnetron Sputtering System Design for TSV(through silicon via) Applications
- Junghoon Joo (Kunsan Nat`l Univ., Korea)
Abstract Download
