Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-098]
- 17:30-19:00 ~
- Title:Control of Plasma Density Distribution by Adding LC Parallel Circuit to Antenna in an Inductively Coupled Plasma
- Tae-Woo Kim and Chin-Wook Chung (Hanyang Univ., Korea)
Abstract Download
