Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-095]
- 17:30-19:00 ~
- Title:Experimental Investigation on Control of Plasma Density Distribution in Inductively Coupled Plasma
- Juho Kim And Chinwook Chung (Hanyang Univ., Korea)
Abstract Download
