Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-091]
- 17:30-19:00 ~
- Title:Etch Characteristics of Superimposed Multi-Frequency Inductively Coupled Plasma Source
- Kyung Chae Yang, Ye Ji Shin, Soo Gang Kim, Jun Ki Jang, Da In Sung, Hyun Woo Tak, and Geun Young Yeom (Sungkyunkwan Univ., Korea)
Abstract Download
