Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-090]
- 17:30-19:00 ~
- Title:Investigation of Capacitively Coupled Plasma with Electron Beam by Impedance Analysis
- Inshik Bae, Hongyoung Chang, and Hohyun Song (KAIST, Korea)
Abstract Download
