Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-082]
- 17:30-19:00 ~
- Title:Numerical Simulation of Electromagnetic Effects in Very High Frequency Capacitively Coupled Plasma
- Jian-Kai Liu, De-Qi Wen, Yu-Ru Zhang, and You-Nian Wang (Dalian Univ. of Tech., China)
Abstract Download
