Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-078]
- 17:30-19:00 ~
- Title:Observation of the Standing Wave Effect in Large-Area, Very-High-Frequency Capacitively Coupled Plasmas by Using a Fiber Bragg Grating Sensor and Hairpin Resonance Probe
- Dao-Man Han, Yong-Xin Liu, Fei Gao, and You-Nian Wang (Dalian Univ. of Tech., China)
Abstract Download