Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-074]
- 17:30-19:00 ~
- Title:ClF3/H2-Plasma Assisted Thermal Etching of Si3N4
- Won Oh Lee1, Jin Woo Park1, Doo San Kim1, Soo Jung Lee1, Han Dock Song2, and Geun Young Yeom1 (1SungKyunKwan Univ., Korea, 2Wonik Materials, Korea)
Abstract Download