Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-073]
- 17:30-19:00 ~
- Title:?Measurements of Plasma Density and Downstream Etching of Silicon and Silicon Oxide in Ar/NF3 Mixture Remote Plasma Source
- HeeJung Yeom1, YeongSeok Lee2, SiJun Kim2, DaeHan choi1, DaeJin Seong1, JungHyung Kim1, ShinJae You2, and Hyo Chang Lee1 (1KRISS, Korea, 2Chungnam Nat`l Univ., Korea)
Abstract Download
