Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-071]
- 17:30-19:00 ~
- Title:Plasma Chemistry Study of Hydrogen/Oxygen Mixture (H2/O2), Hydrogen Peroxide (H2O2), Water Vapor (H2O), and Isopropyl Alcohol (IPA) in Inductively Coupled Plasma (ICP)
- Shuang Meng and Shawming Ma (Mattson Tech., Inc., USA)
Abstract Download