Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-070]
- 17:30-19:00 ~
- Title:Dry Etching of Copper Thin Films in High Density Plasma of Organic Acids
- Jin Su Ryu, Eun Taek Lim, Jae Sang Choi , and chee Won Chung (Inha Univ., Korea)
Abstract Download
