Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-069]
- 17:30-19:00 ~
- Title:Effect of Non-Corrosive Gas Mixture on Etching of Cu Thin Film Using Inductively Coupled Plasma Reactive Ion Etching
- Eun Taek Lim, Jin Su Ryu, Jae Sang Choi, and Chee Won Chung (Inha Univ., Korea)
Abstract Download
