Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-068]
- 17:30-19:00 ~
- Title:Etch Characteristics of Nanoscalepatterned Magnetic Tunnel Junction Stacks Using Pulse-Modulated RF Sourceplasma
- Jae Yong Lee, Eun Taek Lim, Jin Su Ryu, Jae Sang Choi, and Chee Won Chung (Inha Univ., Korea)
Abstract Download