Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-067]
- 17:30-19:00 ~
- Title:Modeling of Dry Cleaning Processes of Semiconductor Surfaces Using Fluorine-Based Etchant Gases
- Tanzia Chowdhury, Romel Hidayat, Tirta Rona Mayangsari, Jiyeon Gu, Hye-Lee Kim, Jongwan Jung, and Won-Jun Lee (Sejong Univ., Korea)
Abstract Download
