Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-066]
- 17:30-19:00 ~
- Title:Investigation of Plasma-Surface Reactions in a Large Scale Very-High-Frequency(162MHz) CCP for Atomic Layer Processing of SiO2
- Cleo Harvey, Nishant Sirse, Cezar Gaman, and Bert Ellingboe (Dublin City Univ., Ireland)
Abstract Download
