Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-032]
- 17:30-19:00 ~
- Title:Characteristics of Films Prepared by Various Inner Magnet Arrangements in Facing Targets Sputtering
- Lee Sang Min1, Yu Jin Kim1, Dae San Lee1, Sangmo Kim1, Min Jong Keum2, and Kyung Hwan Kim1 (1Gachon Univ., Korea, 2Junsung Engineering, Korea)
Abstract Download