Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-029]
- 17:30-19:00 ~
- Title:Properties of Very Thin Tungsten Film Deposited Using Inductively Coupled Plasma Assisted Sputtering
- Soo Jung Lee, Tae Hyung Kim, Byeong Hwa Jeong, Chang Hoon Song, Won Oh Lee, You Jin Ji, and Geun Young Yeom (Sungkyunkwan Univ., Korea)
Abstract Download
