Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-028]
- 17:30-19:00 ~
- Title:Co Liner for Enhancement of Cu Damascene Interconnections
- Byeonghwa Jeong1, Yongseok Jang1, Eungjoon Lee1, Masamichi Harada2, Yutaka Kokaze2, and Geunyoung Yeom3 (1ULVAC KOREA, Ltd, Korea, 2ULVAC, Inc., Japan, 3Sungkyunkwan Univ., Korea)
Abstract Download
