Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-027]
- 17:30-19:00 ~
- Title:Ion Energy Distribution in High Power Impulse Magnetron Sputtering Discharge Using Carbon Target
- Kazunori Iga1, Akinori Oda2, Hiroyuki Kousaka3, and Takayuki Ohta1 (1Meijo Univ., Japan, 2Chiba Inst. of Tech., Japan, 3Gifu Univ., Japan)
Abstract Download