Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room F (#117~118)
TP. Poster Session
July 26 (Thu.)
17:30-19:00 ~
[TP-001]
17:30-19:00 ~
Room F (#117~118)
Non-Thermal DBD Plasma Treatment Improves Chicken Sperm Motility via the Regulation of Demethylation Levels
Jiao Jiao Zhang
1
, Nisansala Chandimali
1
, Tae Yoon Kang
1
, Hyebin Koh
1
, Do Luong Huynh
1
, Seong Bong Kim
2
, Taeho Kwon
1
, and Dong Kee Jeong1 (
1
Jeju Nat`l Univ., Korea,
2
NFRI, Korea)
[TP-002]
17:30-19:00 ~
Room F (#117~118)
Development of Freshness Preservation Technology for Cultured Yellowtail Using Pulsed Power Technology
Kosuke Kawaoka, Masaaki Yano, Mikiya Matsuda, Douyan Wang, and Takao Namihira (Kumamoto Univ., Japan)
[TP-003]
17:30-19:00 ~
Room F (#117~118)
Theconversion of Ginsenoside in Ginseng Extract by Plasma Treated Water (PTW)
Sunkyung Jung, Jin-Hwan Kim, and Sunkyung Jung (NFRI, Korea)
[TP-004]
17:30-19:00 ~
Room F (#117~118)
Study on the Disinfection of Rice Seeds Using Surface DBD Plasma
Min Ho Kang
1
, Sangheum Eom
2
, Hyung Won Jeon
2
, Jung Woo Yoon
2
, Seong Bong Kim
2
, Suk Jae Yoo
2
, Eun Ha Choi
1
, Seungmin Ryu
2
, and Gyungsoon Park1 (
1
Kwangwoon Univ., Korea,
2
NFRI, Korea)
[TP-005]
17:30-19:00 ~
Room F (#117~118)
Non-Thermal Dielectric Barrier Discharge Plasma Technology for Agriculture Food
Jiao Jiao Zhang, Hyebin Koh, Nameun Kim, Mrinmoy Ghosh, Meeta Gera, Taeho Kwon, and Dong Kee Jeong (Jeju Nat`l Univ., Korea)
[TP-006]
17:30-19:00 ~
Room F (#117~118)
Fungicidal Effects of Atmospheric Pressure Plasma on Plant Pathogens in Panax Ginseng
Jong-Seok Song, Sang Hye Ji, Sangheum Eom, Jin-Hwan Kim, Sunkyung Jung, Jaesung Oh, Seungmin Ryu, Yong-Seong Byeon, Min-Ho Kang, and Seong Bong Kim (NFRI, Korea)
[TP-007]
17:30-19:00 ~
Room F (#117~118)
Development of Customized Power Supply Device for the Array Typed DBD Plasma Generating at Atmospheric Pressure
Sangheum Eom, Changho Yi, Sang Hye Ji, Seong Bong Kim, and Seungmin Ryu (NFRI, Korea)
[TP-008]
17:30-19:00 ~
Room F (#117~118)
The Study of Micro DBD Plasma with the Seedling Growthand Antioxidant Activity in Panax Ginseng C. A.Meyer
Ji Sang Hye, Yoo Seungryul, Kim Seong Bong, Yoo Suk Jae, and Jaesung Oh (NFRI, Korea)
[TP-009]
17:30-19:00 ~
Room F (#117~118)
Removal of Stench in Livestock Production Facility?Using a Pulsed Corona Discharge Plasma
InSun Park
1
, DongChan Seok
2
, InJe Kang
1
, Min-Keun Bae
1
, Yong-Sup Choi
2
, Taihyeop Lho
2
, Sang-Eun Oh
3
, JaeE Yang
3
, and Kyu-Sun Chung1 (
1
Hanyang Univ., Korea,
2
NFRI, Korea,
3
Kangwon Nat`l Univ., Korea)
[TP-010]
17:30-19:00 ~
Room F (#117~118)
Control of Nitric Oxide Production in a Surface Dielectric Barrier Discharge Plasma at Atmospheric Pressure
S. PARK, C. YI, J.H. KIM, S.Y. YOON, S. RYU, and S.B. KIM (NFRI, Korea)
[TP-011]
17:30-19:00 ~
Room F (#117~118)
The Physical and Chemical Characteristics of Non-Thermal Plasma Treated Solution-Mist Spray: A First Step toward Optimization in Disinfection Process
Yong-Seong Byeon, Eun Jeong Hong, Seong Bong Kim, and Junghyun Lim (NFRI, Korea)
[TP-012]
17:30-19:00 ~
Room F (#117~118)
Proposed a Method of Plasma Treated Water(PTW) Generation; PTW Characteristic with Hybrid of Pin-to-Water and Underwater Capillary Discharge
Yong-Seong Byeon, Eun Jeong Hong, Junghyun Lim, Seong Bong Kim, and Yong-Seong Byeon (NFRI, Korea)
[TP-013]
17:30-19:00 ~
Room F (#117~118)
Effects of Rotational Speed on Inactivation of E.Coli in Red Pepper Powder by DBD Plasma
Eunjeong Hong, Junghyun Lim, Yong-Seong Byeon, Seong Bong Kim, and Seungmin Ryu (NFRI, Korea)
[TP-014]
17:30-19:00 ~
Room F (#117~118)
The Study of Residual Pesticides Removal in Fresh Food Using the Plasma Reactive Species
Hyeongwon Jeon, Sangheum Eom, Junghyun Lim, Jungwoo Yoon, Changho Yi, Jongseok Song, and Seungmin Ryu (NFRI, Korea)
[TP-015]
17:30-19:00 ~
Room F (#117~118)
Chemical Probe Calibration for Reactive Oxygen Radicals with Hydrogen Peroxide and Low Energy X-Rray
Hiroto Matsuura, Yoshiki Matsui, Jin Sakamoto, Tran Trung Nguyen, Kheim Do Duy, and Masafumi Akiyoshi (Osaka Prefecture Univ., Japan)
[TP-016]
17:30-19:00 ~
Room F (#117~118)
Plasma Assisted Preparation of ZnS and ZnO Nanomaterials and Plasma-Nano Treatment of Pollutant Dyes
Ananth Antony, Won Chang Lee, Hyeon Jin Seo, Jin-Hyo Boo, and Byung You Hong (Sungkyunkwan Univ., Korea)
[TP-017]
17:30-19:00 ~
Room F (#117~118)
Chemical Agent Destruction Using Flexible Surface DBD Plasma with Metaloxide Nanoparticles
Heesoo Jung (Agency for Defense Development, Korea)
[TP-018]
17:30-19:00 ~
Room F (#117~118)
Effects of Argon Micro-Bubble Assistance on the Performance of 3D Integrated Micro Solution Plasma
Reiya Nakagawa, Hiroto Masunaga, Jun-Seok Oh, and Tatsuru Shirafuji (Osaka City Univ., Japan)
[TP-019]
17:30-19:00 ~
Room F (#117~118)
Effects of Pulse Voltage Polarity on GNP-Embedded Polymer Formation on Aqueous Solution Irradiated with Ar DBD Plasma
Shunta Hirano
1
, Shiori Azuma
1
, Yusuke Nakamura
1
, Jun-Seok Oh
1
, Toshiyuki Isshiki
2
, and Tatsuru Shirafuji1 (
1
Osaka City Univ., Japan,
2
Kyoto Inst. Tech., Japan)
[TP-020]
17:30-19:00 ~
Room F (#117~118)
Synthesis of Carbon Coated TiO2 by Underwater Discharge with Capillary Carbon Electrode.
HyunJae Park, Seungryul Yoo, and Kangil Kim (NFRI, Korea)
[TP-021]
17:30-19:00 ~
Room F (#117~118)
Effect of Pulse Current on Formation Behavior of Plasma Electrolytic Oxidation Films on Al Alloy
Juseok Kim
1
, Sungmo Moon
1
, and Heon-cheol Shin2 (
1
KIMS, Korea,
2
Pusan Nat`l Univ., Korea)
[TP-022]
17:30-19:00 ~
Room F (#117~118)
Solution Plasma Synthesis of Nitrogen and Cobalt-Containing Carbon Materials
Shuhei Kato, Amane Kaneko, Camelia Miron, and Takahiro Ishizaki (Shibaura Inst. of Tech., Japan)
[TP-023]
17:30-19:00 ~
Room F (#117~118)
Synthesis of SiC Nanoparticles by Solution Plasma
Ryo Iwano, Camelia Miron, and Takahiro Ishizaki (Shibaura Inst. of Tech., Japan)
[TP-024]
17:30-19:00 ~
Room F (#117~118)
Anodic Oxidation Behavior of AZ31 Mg Alloy in Na2SnO3 Solutions Containing Various Anions
Yeajin Kim and Sungmo Moon (KIMS, Korea)
[TP-025]
17:30-19:00 ~
Room F (#117~118)
Characteristic Comparison between Positive and Negative Nanosecond Pulsed Discharges
Hitoshi Yamaguchi, Terumasa Ryu, Takao Namihira, and Douyan Wang (Kumamoto Univ., Japan)
[TP-026]
17:30-19:00 ~
Room F (#117~118)
Two-Bit-Per-Cell Resistive Switching Memory Device with ITO/Zn2TiO4 /Pt Structure
Shi?Xiang Chen, Shoou?Jinn Chang, Sheng-Po Chang, Cheng-Han Lin, and Kuan-Jen Chen (Nat`l Cheng Kung Univ., Taiwan)
[TP-027]
17:30-19:00 ~
Room F (#117~118)
Ion Energy Distribution in High Power Impulse Magnetron Sputtering Discharge Using Carbon Target
Kazunori Iga
1
, Akinori Oda
2
, Hiroyuki Kousaka
3
, and Takayuki Ohta1 (
1
Meijo Univ., Japan,
2
Chiba Inst. of Tech., Japan,
3
Gifu Univ., Japan)
[TP-028]
17:30-19:00 ~
Room F (#117~118)
Co Liner for Enhancement of Cu Damascene Interconnections
Byeonghwa Jeong
1
, Yongseok Jang
1
, Eungjoon Lee
1
, Masamichi Harada
2
, Yutaka Kokaze
2
, and Geunyoung Yeom3 (
1
ULVAC KOREA, Ltd, Korea,
2
ULVAC, Inc., Japan,
3
Sungkyunkwan Univ., Korea)
[TP-029]
17:30-19:00 ~
Room F (#117~118)
Properties of Very Thin Tungsten Film Deposited Using Inductively Coupled Plasma Assisted Sputtering
Soo Jung Lee, Tae Hyung Kim, Byeong Hwa Jeong, Chang Hoon Song, Won Oh Lee, You Jin Ji, and Geun Young Yeom (Sungkyunkwan Univ., Korea)
[TP-030]
17:30-19:00 ~
Room F (#117~118)
Growth of Titanium Suboxide Thin Films by Reactive DC Magnetron Sputtering
Jin-Soo Kim, Hyeok Jee, and Hye-Won Seo (Jeju Nat`l Univ., Korea)
[TP-031]
17:30-19:00 ~
Room F (#117~118)
Substrate Temperature and Sputtering Power Effect on the Growth of MgO Thin Films
Jitendra Pal Singh and Keun Hwa Chae (KIST, Korea)
[TP-032]
17:30-19:00 ~
Room F (#117~118)
Characteristics of Films Prepared by Various Inner Magnet Arrangements in Facing Targets Sputtering
Lee Sang Min
1
, Yu Jin Kim
1
, Dae San Lee
1
, Sangmo Kim
1
, Min Jong Keum
2
, and Kyung Hwan Kim1 (
1
Gachon Univ., Korea,
2
Junsung Engineering, Korea)
[TP-033]
17:30-19:00 ~
Room F (#117~118)
TiO2 Thin Film by Reactive Sputtering
Pyeong Seob Song, Sang Ho Hwang, Yeong Jo Baek, In Hye Kang, Min Su Kang, Seok Jun Kang, Ye Lin Han, and Byung Seong Bae (Hoseo Univ., Korea)
[TP-034]
17:30-19:00 ~
Room F (#117~118)
Effects of High-Intensity Pulsed Ion Beam Irradiation on the Structural Thermal Stability of Fe-Based and Ni-Based Metallic Glasses
Xianxiu Mei
1
, Qi Zhang
1
, Xiaonan Zhang
1
, Younian Wang
1
, Gennady E. Remnev
2
, and Sergey K. Pavlov2 (
1
Dalian Univ. of Tech., China,
2
Nat`l Research Tomsk Polytechnic Univ., Russia)
[TP-035]
17:30-19:00 ~
Room F (#117~118)
Preparation and Characterization of the Sputtered TiAlN Coatings Using a Ti-Al Alloy Metal Target
Jiseon Kwon
1
, Hwa-Min Kim
1
, Chang-Hyun Lee
1
, Changhwan Park
1
, Jaewoong Choi
1
, Taewoo Kim
1
, Sunyoung Sohn
2
, and Seongcheol Choi1 (
1
Daegu Catholic Univ., Korea,
2
POSTECH, Korea)
[TP-036]
17:30-19:00 ~
Room F (#117~118)
Characteristics of TiC/a-C Nanocomposite Films Prepared by Closed-Fileld Unbalanced Magnetron Sputtering for Bio-Medical Application
Yong Seob Park1 and Jaehyeong Lee2 (
1
Chosun College of Science and Tech., Korea,
2
Sungkyunkwan Univ., Korea)
[TP-037]
17:30-19:00 ~
Room F (#117~118)
Roll-to-Rollsputtered ZnSnO/AgPdCu/ZnSnO Multilayer Electrodes for Flexible Thin-Film Heaters and Heat-Shielding Films
Haejun Seok
1
, Hyeonwoo Jang
2
, Dongyeop Lee
2
, Beomgwon Son
2
, And Hanki Kim1 (
1
Sungkyunkwan Univ., Korea,
2
LG Chem Co., Ltd., Korea)
[TP-038]
17:30-19:00 ~
Room F (#117~118)
Spectroscopic Ellipsometry Study of Transition Metal Chalcogenide Thin Films Grown by RF Magnetron Sputtering
Younghun Hwang
1
, Manil Kang
2
, and Hyoyeol Park1 (
1
Ulsan College, Korea,
2
Univ. of Ulsan, Korea)
[TP-039]
17:30-19:00 ~
Room F (#117~118)
Electrical, Optical, and Magnetic Properties of Magnetron-Sputtered and RTAed NiO:Nd Thin Films
Seongha Oh
1
, Yong Seob Park
2
, and Nam-Hoon Kim1 (
1
Chosun Univ., Korea,
2
Chosun College of Science and Tech., Korea)
[TP-040]
17:30-19:00 ~
Room F (#117~118)
Dependence of the Characteristics of Aluminum-Doped Zinc Oxide Films on the Reversed Pulse Times and Oxygen Gas Ratio in the Pulsed-DC Sputtering
Hyungseok Ryu, Zhenqian Zhao, Sang Jik Kwon, and Eou-Sik Cho (Gachon Univ., Korea)
[TP-041]
17:30-19:00 ~
Room F (#117~118)
Optical Properties of Reversible Phase-Change Silver Selenide Thin Films by Co-Sputtering for Smart Window Applications
Sakal Pech, Myoung Han Yoo, Pil Ju Ko, and Nam-Hoon Kim (Chosun Univ., Korea)
[TP-042]
17:30-19:00 ~
Room F (#117~118)
Effect of Silicon Content in Diamond-Like Carbon Film Deposited by Magnetron Sputtering
Yuki Miwa
1
, Akinori Oda
2
, Hiroyuki Kousaka
3
, and Takayuki Ohta1 (
1
Meijo Univ., Japan,
2
Chiba Inst. of Tech., Japan,
3
Gifu Univ., Japan)
[TP-043]
17:30-19:00 ~
Room F (#117~118)
Effect of Annealing on Surface Morphology and Wettability of NC-FeSi?2? Films Produced via Facing-Target Direct-Current Sputtering
Peerasil Charoenyuenyao
1
, Nathaporn Promros
1
, Rawiwan Chaleawpong
1
, Bunpot Saekow
2
, Supanit Porntheeraphat
2
, and Tsuyoshi Yoshitake3 (
1
King Mongkut`s Inst. of Tech. Ladkrabang, Thailand,
2
Nat`l Electronics and Computer Tech. Center, Thailand,
3
Kyushu Univ., Japan)
[TP-044]
17:30-19:00 ~
Room F (#117~118)
Physical Properties of Diamond-Like Carbon Films Fabricated by Utilization of Magnetron Sputtering Source with Changing Outer Permanent Magnets
Peerasil Charoenyuenyao
1
, Rawiwan Chaleawpong
1
, Sakmongkon Teekchaicum
1
, Nathaporn Promros
1
, Phongsaphak Sittimart
1
, and Boonchoat Paosawatyanyong2 (
1
King Mongkut`s Inst. of Tech. Ladkrabang, Thailand,
2
Chulalongkorn Univ., Thailand)
[TP-045]
17:30-19:00 ~
Room F (#117~118)
A Parametric Model for Temperature Dependence of Dielectric Function of AlSb Film
Van Long Le, Tae Jung Kim, Han Gyeol Park, Hoang Tung Nguyen, Jeoung Min Ji, Xuan Au Nguyen, and Young Dong Kim (Kyung Hee Univ., Korea)
[TP-046]
17:30-19:00 ~
Room F (#117~118)
Study on the Surface Contact Angle of YBCO Thin Film Superconducting Wire by Sputter Surface Treatment
Hyeon-Gi Jeong, Ho-Ik Du, and Sung-Chae Yang (Chonbuk Nat`l Univ., Korea)
[TP-047]
17:30-19:00 ~
Room F (#117~118)
Local Electronic Structure of Radio Frequency Sputtered MgO Thin Film under Swiftheavy Ion Irradiation
Jitendra Pal Singh
1
, Weon Cheol Lim
1
, Manish Kumar
2
, Richa Bhardwaj
3
, Sanjeev Gautam
3
, H. H. Lee
2
, K. Asokan
4
, Navdeep Goyal
3
, and Keun Hwa Chae1 (
1
KIST, Korea,
2
PAL, Korea,
3
Panjab Univ., India,
4
IUAC, India)
[TP-048]
17:30-19:00 ~
Room F (#117~118)
Investigation of Deuterium and Helium Plasma Irradiation Effect on Tungsten Erosion
Myeong-Geon Lee
1
, Jaemin Song
2
, Ki-Baek Roh
1
, Nam-Kyun Kim
1
, and Gon-Ho Kim1 (
1
Seoul Nat`l Univ., Korea,
2
NFRI, Korea)
[TP-049]
17:30-19:00 ~
Room F (#117~118)
Enhancement of Crack through the Depth of Grain Growth on Tungsten under Transient High Heat Flux
Ki-Baek Roh
1
, Nam-Kyun Kim
1
, Jaemin Song
1
, Kyungmin Kim
2
, Myung-gun Lee
1
, and Gon-Ho Kim1 (
1
Seoul Nat`l Univ., Korea,
2
NFRI, Korea)
[TP-050]
17:30-19:00 ~
Room F (#117~118)
Experimental Study on Preparation of Spherical Alumina Powder by Laminar Plasma Jet
Hui Jiang, Deping Yu, and Jin Yao (Sichuan Univ., China)
[TP-051]
17:30-19:00 ~
Room F (#117~118)
Low Temperature Growth of Single-Walled Carbon Nanotubes Using Plasma-Assisted Chemical Vapor Deposition System
Sung-Il Jo and Goo-Hwan Jeong (Kangwon Nat`l Univ., Korea)
[TP-052]
17:30-19:00 ~
Room F (#117~118)
Surface Structuration and Control of the CuS Particle Size by the Discharge Mode of Inductively Coupled Plasma and Vapor-Phase Sulfurization
Daehan Choi
1
, Tae-Wan Kim
1
, Rauf Shahzad
1
, Hyeji Park
1
, H.J. Yeom
1
, J.H. Kim
1
, D.J. Seong
1
, Sang-Woo Kang
1
, Euijoon Yoon
2
, and Hyo-Chang Lee1 (
1
KRISS, Korea,
2
Seoul Nat`l Univ., Korea)
[TP-053]
17:30-19:00 ~
Room F (#117~118)
C-V-f, G-V-f and Z"-Z` Characteristics of n-Type Si/B-doped p-Type Ultrananocrystalline Diamond Heterojunctions Formed via Pulsed Laser Deposition
Rawiwan Chaleawpong
1
, Nathaporn Promros
1
, Peerasil Charoenyuenyao
1
, Weerasaruth Kaenrai
1
, Adison Nopparuchikun
1
, Takanori Hanada
2
, Shinya Ohmagari
3
, and Tsuyoshi Yoshitake2 (
1
King Mongkut`s Inst. of Tech. Ladkrabang, Thailand,
2
Kyushu Univ., Japan,
3
AIST, Japan)
[TP-054]
17:30-19:00 ~
Room F (#117~118)
Surface Morphology and Wettability of Ultrananocrystalline Diamond Films
Rawiwan Chaleawpong
1
, Nathaporn Promros
1
, Peerasil Charoenyuenyao
1
, Eslam Abubakr
2
, Satoshi Takeichi
2
, Abdelrahman Zkria
2
, Kenji Hanada
2
, and Tsuyoshi Yoshitake2 (
1
King Mongkut`s Inst. of Tech. Ladkrabang, Thailand,
2
Kyushu Univ., Japan)
[TP-055]
17:30-19:00 ~
Room F (#117~118)
Grain Boundary Observation of CVD Graphene Based on Oxygen Plasma
Gwan-Hyoung Lee, Jong-Young Lee, and Min Jung Kim (Yonsei Univ., Korea)
[TP-056]
17:30-19:00 ~
Room F (#117~118)
Defect-Free Doping on Graphene Using Horizontal Inductively Coupled Plasma System
Sung-Il Jo
1
, Byeong-Joo Lee
2
, and Goo-Hwan Jeong1 (
1
Kangwon Nat`l Univ., Korea,
2
Nat`l NanoFab Center, Korea)
[TP-057]
17:30-19:00 ~
Room F (#117~118)
The Effect of Fluorine Plasma Treatment on?-Ga2O3 Transistors
Janghyuk Kim and Jihyun Kim (Korea Univ., Korea)
[TP-058]
17:30-19:00 ~
Room F (#117~118)
Non-Equilibrium Condensation Process for Synthesis of Cosmic Dust Analogues by Triple Thermal Plasma Jet
Tae-Hee Kim
1
, Jeong-Hwan Oh
1
, Minseok Kim
1
, Yong Hee Lee
1
, Akira Tsuchiyama
2
, Junya Matsuno
2
, Aki Takigawa
2
, and Sooseok Choi1 (
1
Jeju Nat`l Univ., Korea,
2
Kyoto Univ., Korea)
[TP-059]
17:30-19:00 ~
Room F (#117~118)
Atmospheric Plasma Deposited Titanium Dioxide Thin Films: Surface and Plasma Chemistry
Rodolphe Mauchauffe, Seongchan Kang, and Se Youn Moon (Chonbuk Nat`l Univ., Korea)
[TP-060]
17:30-19:00 ~
Room F (#117~118)
Synthesis of Tungsten Carbide Nanoparticles in Triple Thermal Plasma Jet System
Jeong-Hwan Oh, Minseok Kim, Young Hee Lee, Seung-Hyun Hong, Tae-Hee Kim, and Sooseok Choi (Jeju Nat`l Univ., Korea)
[TP-061]
17:30-19:00 ~
Room F (#117~118)
Electrical Discharge in Liquid Nitrogen for Particle Preparation
Yoon Sik Park
1
, Dong-Wook Kim
2
, Satoshi Kodama
1
, and Hidetoshi Sekiguchi1 (
1
Tokyo Inst. of Tech., Japan,
2
Inha Univ, Korea)
[TP-062]
17:30-19:00 ~
Room F (#117~118)
Bacteria Spectroscopic Detection Using Amine-Modified Fe3O4/C Synthesized in Submerged Plasma Arc Discharge
Teguh Endah Saraswati
1
, Anis Robi Astuti
1
, Nana Rismana
1
, and Masaaki Nagatsu2 (
1
Sebelas Maret Univ., Indonesia,
2
Shizuoka Univ., Japan)
[TP-063]
17:30-19:00 ~
Room F (#117~118)
Purification and Doping of Nano-Thin Exfoliated(NTE) Graphite for EMI Shielding by RF Thermal Plasma System
Kyu-Hang Lee
1
, Myung-Sun Shin
1
, Byung-Koo Son
1
, Soon-Jik Lee
2
, Jeong-Mi Yeon
2
, and Sun-Yong Choi2 (
1
Kwangwoon Univ., Korea,
2
Cheorwon Plasma Research Inst., Korea)
[TP-064]
17:30-19:00 ~
Room F (#117~118)
Molecular Dynamics Simulation of Nanometer-Scale Hole Etching
Charisse Marie Donato Cagomoc, Michiro Isobe, and Satoshi Hamaguchi (Osaka Univ., Japan)
[TP-065]
17:30-19:00 ~
Room F (#117~118)
ALE of SiO2?by Alternating CF4 Plasma?with Energetic Ar+?Plasma Beams
Wan Dong, Zhongling Dai, Yuanhong Song, and Younian Wang (Dalian Univ. of Tech., China)
[TP-066]
17:30-19:00 ~
Room F (#117~118)
Investigation of Plasma-Surface Reactions in a Large Scale Very-High-Frequency(162MHz) CCP for Atomic Layer Processing of SiO2
Cleo Harvey, Nishant Sirse, Cezar Gaman, and Bert Ellingboe (Dublin City Univ., Ireland)
[TP-067]
17:30-19:00 ~
Room F (#117~118)
Modeling of Dry Cleaning Processes of Semiconductor Surfaces Using Fluorine-Based Etchant Gases
Tanzia Chowdhury, Romel Hidayat, Tirta Rona Mayangsari, Jiyeon Gu, Hye-Lee Kim, Jongwan Jung, and Won-Jun Lee (Sejong Univ., Korea)
[TP-068]
17:30-19:00 ~
Room F (#117~118)
Etch Characteristics of Nanoscalepatterned Magnetic Tunnel Junction Stacks Using Pulse-Modulated RF Sourceplasma
Jae Yong Lee, Eun Taek Lim, Jin Su Ryu, Jae Sang Choi, and Chee Won Chung (Inha Univ., Korea)
[TP-069]
17:30-19:00 ~
Room F (#117~118)
Effect of Non-Corrosive Gas Mixture on Etching of Cu Thin Film Using Inductively Coupled Plasma Reactive Ion Etching
Eun Taek Lim, Jin Su Ryu, Jae Sang Choi, and Chee Won Chung (Inha Univ., Korea)
[TP-070]
17:30-19:00 ~
Room F (#117~118)
Dry Etching of Copper Thin Films in High Density Plasma of Organic Acids
Jin Su Ryu, Eun Taek Lim, Jae Sang Choi , and chee Won Chung (Inha Univ., Korea)
[TP-071]
17:30-19:00 ~
Room F (#117~118)
Plasma Chemistry Study of Hydrogen/Oxygen Mixture (H2/O2), Hydrogen Peroxide (H2O2), Water Vapor (H2O), and Isopropyl Alcohol (IPA) in Inductively Coupled Plasma (ICP)
Shuang Meng and Shawming Ma (Mattson Tech., Inc., USA)
[TP-072]
17:30-19:00 ~
Room F (#117~118)
Profile Characteristics of Sintered SiC Line Etching by Atmospheric Pressure Plasma
Yong Ho Jung, Dong Chan Seok, Gangil Lee, and Seungryul Yoo (NFRI, Korea)
[TP-073]
17:30-19:00 ~
Room F (#117~118)
?Measurements of Plasma Density and Downstream Etching of Silicon and Silicon Oxide in Ar/NF3 Mixture Remote Plasma Source
HeeJung Yeom
1
, YeongSeok Lee
2
, SiJun Kim
2
, DaeHan choi
1
, DaeJin Seong
1
, JungHyung Kim
1
, ShinJae You
2
, and Hyo Chang Lee1 (
1
KRISS, Korea,
2
Chungnam Nat`l Univ., Korea)
[TP-074]
17:30-19:00 ~
Room F (#117~118)
ClF3/H2-Plasma Assisted Thermal Etching of Si3N4
Won Oh Lee
1
, Jin Woo Park
1
, Doo San Kim
1
, Soo Jung Lee
1
, Han Dock Song
2
, and Geun Young Yeom1 (
1
SungKyunKwan Univ., Korea,
2
Wonik Materials, Korea)
[TP-075]
17:30-19:00 ~
Room F (#117~118)
Improvement of Productivity through Time Reduction by Using Cleaning Process Optimization Using OES Wavelength of Semiconductor Plasma Equipment
In Young Back (Samsung Electronics Co., Ltd., Korea)
[TP-076]
17:30-19:00 ~
Room F (#117~118)
The Enhancement of the Flash Memory Boosting Efficiency by Adding Deep N- Phosphorous Implantation
Youngho Kwon
1
, Hyoungsun Park
2
, Ikhyung Joo
2
, Sungjin Jang
1
, and Byoungdeog Choi1 (
1
Sungkyunkwan Univ., Korea,
2
Samsung Electronics Co., Ltd., Korea)
[TP-077]
17:30-19:00 ~
Room F (#117~118)
Electrical Characterization, Heat Flux and the Reactive Oxygen Radical Production of Argon Atmospheric Pressure Plasma Jet with Alcohol
Trung Nguyen Tran
1
, Hiroto Matsuura
1
, Yoshiki Matsui
1
, Jian Chen
1
, and Yuichiro Takemura2 (
1
Osaka Prefecture Univ., Japan,
2
Kindai Univ., Japan)
[TP-078]
17:30-19:00 ~
Room F (#117~118)
Observation of the Standing Wave Effect in Large-Area, Very-High-Frequency Capacitively Coupled Plasmas by Using a Fiber Bragg Grating Sensor and Hairpin Resonance Probe
Dao-Man Han, Yong-Xin Liu, Fei Gao, and You-Nian Wang (Dalian Univ. of Tech., China)
[TP-079]
17:30-19:00 ~
Room F (#117~118)
Electronimpact Excitation Diagnostics in Pulse-Modulated Ar/O2 Inductively Coupled Plasma
Chan Xue, Fei Gao, De-Qi Wen, and You-Nian Wang (Dalian Univ. of Tech., China)
[TP-080]
17:30-19:00 ~
Room F (#117~118)
100 kW Dc Arc Generator with a Divergent Channel Ofinter-Electric Inserter and Anode
Wenxia Pan, Xian Meng, and Yong Zhang (Chinese Academy of Sciences, China)
[TP-081]
17:30-19:00 ~
Room F (#117~118)
Dynamics of Energetic Electrons at the Igniting Phase in a Pulsed Capacitively Coupled Plasma
Xiang-Yu Wang and Yong-Xin Liu (Dalian Univ. of Tech., China)
[TP-082]
17:30-19:00 ~
Room F (#117~118)
Numerical Simulation of Electromagnetic Effects in Very High Frequency Capacitively Coupled Plasma
Jian-Kai Liu, De-Qi Wen, Yu-Ru Zhang, and You-Nian Wang (Dalian Univ. of Tech., China)
[TP-083]
17:30-19:00 ~
Room F (#117~118)
Characteristic Study of Radio-Frequency Inductively Coupled Hydrogen and Deuterium Plasma Operated at High Power and Low Pressure
Peng-Cheng Du, Fei Gao, Hong Li, and You-Nian Wang (Dalian Univ. of Tech., China)
[TP-084]
17:30-19:00 ~
Room F (#117~118)
PIC/MC Simulation of Breakdown Dynamic Near High Power Microwave Out-Put Window Inside
Chun-Yan Zuo, Fei Gao, Zhong-Ling Dai, and You-Nian Wang (Dalian Univ. of Tech., China)
[TP-085]
17:30-19:00 ~
Room F (#117~118)
Integrated Initiation Carrier Injection for Low Voltage Plasma Generation
Hyunho Park, Changhun Hong, and Youngmin Kim (Hongik Univ., Korea)
[TP-086]
17:30-19:00 ~
Room F (#117~118)
PIC Simulation on the Effects of Secondary Electron Emission in Capacitive Oxygen Discharges
Li Wang, Yuan-Hong Song, and You-Nian Wang (Dalian Univ. of Tech., China)
[TP-087]
17:30-19:00 ~
Room F (#117~118)
Pressure Effect on Polycrystalline Diamond Film Deposition Using Modulated to Non-Modulated Induction Thermal Plasmas
Takashi Arai, Betsuin Toshiki, Yasunori Tanaka, Yoshihiko Uesugi, and Tatsuo Ishijima (Kanazawa Univ., Japan)
[TP-088]
17:30-19:00 ~
Room F (#117~118)
Characteristics of Inkjet-Printed Dielectric Barrier Discharge Source
Jinwoo Kim, SangHoo Park, JooYoung Park, and Wonho Choe (KAIST, Korea)
[TP-089]
17:30-19:00 ~
Room F (#117~118)
Miniaturization of Nanosecond Pulsed Discharge System for Industrial Application
Takehiro Yamaguchi , Ryuki Matsukawa, Mikiya Matsuda, Douyan Wang, and Takao Namihira (Kumamoto Univ., Japan)
[TP-090]
17:30-19:00 ~
Room F (#117~118)
Investigation of Capacitively Coupled Plasma with Electron Beam by Impedance Analysis
Inshik Bae, Hongyoung Chang, and Hohyun Song (KAIST, Korea)
[TP-091]
17:30-19:00 ~
Room F (#117~118)
Etch Characteristics of Superimposed Multi-Frequency Inductively Coupled Plasma Source
Kyung Chae Yang, Ye Ji Shin, Soo Gang Kim, Jun Ki Jang, Da In Sung, Hyun Woo Tak, and Geun Young Yeom (Sungkyunkwan Univ., Korea)
[TP-092]
17:30-19:00 ~
Room F (#117~118)
Demonstration of an Atmospheric Pressure Capacitively-Coupled-Plasma Driven at VHF(162MHz) for Recycling of CO2 into Renewable Fuels
Cleo Harvey, Saoirse Vandenberg, and Bert Ellingboe (Dublin City Univ., Ireland)
[TP-093]
17:30-19:00 ~
Room F (#117~118)
Discharge Characteristics of Water Thermal Plasmas
Hiroki Munekata, Manabu Tanaka, and Takayuki Watanabe (Kyushu Univ., Japan)
[TP-094]
17:30-19:00 ~
Room F (#117~118)
Sheath and Bulk Expansion in Atmospheric Pressure Microwave Plasma via RF Field Induction
Jimo Lee, Woo Jin Nam, Seung Taek Lee, Jae Koo Lee, and Gunsu Yun (POSTECH, Korea)
[TP-095]
17:30-19:00 ~
Room F (#117~118)
Experimental Investigation on Control of Plasma Density Distribution in Inductively Coupled Plasma
Juho Kim And Chinwook Chung (Hanyang Univ., Korea)
[TP-096]
17:30-19:00 ~
Room F (#117~118)
Improved Deinking Efficiency Using Atmospheric Helium Plasma: Effect of Inkjet Printed Paper
Seung Jun Lee, Isaac Han, Yong Sung You, and Se Youn Moon (Chonbuk Nat`l Univ., Korea)
[TP-097]
17:30-19:00 ~
Room F (#117~118)
Experimental Investigation of Discharge of Transitoin by RF Bias Power in Inductively Coupled Plasma
Howon Lee and Chin-wook Chung (Hanyang Univ., Korea)
[TP-098]
17:30-19:00 ~
Room F (#117~118)
Control of Plasma Density Distribution by Adding LC Parallel Circuit to Antenna in an Inductively Coupled Plasma
Tae-Woo Kim and Chin-Wook Chung (Hanyang Univ., Korea)
[TP-099]
17:30-19:00 ~
Room F (#117~118)
An Atmospheric Low-Power Microwave Plasma Using Two-Parallel-Wires Transmission Line Resonator
Ju Young Park
1
, Ho Jun Lee
1
, and Jun Choi2 (
1
Pusan Nat`l Univ., Korea,
2
KITECH, Korea)
[TP-100]
17:30-19:00 ~
Room F (#117~118)
Development of the Cs-Seeded RF Negative Ion Beam Source
Min Park
1
, Tae-seong Kim
1
, Seung Ho Jeong
1
, and ByungKeun Na2 (
1
KAERI, Korea,
2
NFRI, Korea)
[TP-101]
17:30-19:00 ~
Room F (#117~118)
High-Speed Visualization Of Electrode Phenomena in Nitrogen DC Arc
Masaki Yoshida
1
, Naoki Sakura
1
, Manabu Tanaka
1
, Takayuki Watanabe
1
, Seiichiro Shimizu
2
, and Koji Fujii2 (
1
Kyushu Univ., Japan,
2
Nippon Tungsten Co., Ltd., Japan)
[TP-102]
17:30-19:00 ~
Room F (#117~118)
A Novel Linear Microwave Plasma Source Using Circular TE11 Mode and Continuous Line Slot Antenna
Ju-Hong Cha, Jeehun Jeong, Goonho Kim, and Ho-Jun Lee (Pusan Nat`l Univ., Korea)
[TP-103]
17:30-19:00 ~
Room F (#117~118)
A ?Study on Optimization in Large Area Inductively and Magnetized?Inductively?Coupled Plasma
Eui-Jeong Son, Sung Hwan Cho, and Ho-Jun Lee (Pusan Nat`l Univ., Korea)
[TP-104]
17:30-19:00 ~
Room F (#117~118)
Nitridation of SiO2 Surface by VHF (162 MHz) Multi-Tile Push-Pull Plasma Source
You Jin Ji
1
, Ki Seok Kim
1
, Ki Hyun Kim
1
, Ji Young Byun
1
, Soo Jung Lee
1
, Albert Rogers Ellingboe
2
, and Geun Young Yeom1 (
1
Sungkyunkwan Univ., Korea,
2
Dublin City Univ., Ireland)
[TP-105]
17:30-19:00 ~
Room F (#117~118)
Fabrication and Characterization of HfC/TiC Multilayer Coating by Vacuum Plasma Spraying
Ho-Seok Kim, Bo-Ram Kang, Se-Youn Moon, and Seong-Man Choi (Chonbuk Nat`l Univ., Korea)
[TP-106]
17:30-19:00 ~
Room F (#117~118)
Zirconium Carbide Coatings Fabricated by Vacuum Plasma Spraying
Boram Kang
1
, Seyoun Moon
1
, Hoseok Kim
1
, Jongkyoo Park
2
, And Jungmin Lee2 (
1
Chonbuk Nat`l Univ., Korea,
2
Agency for Defense Development, Korea)
[TP-107]
17:30-19:00 ~
Room F (#117~118)
Effective Ammonia Synthesis by Synchronizing of Pressure Swing and Discharge Switching
Yuya Fujimoto and Shinsuke Mori (Tokyo Inst. of Tech., Japan)
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